The VS Series are oil rotary vacuum pumps with direct-coupled motors. They use a single level of vanes (rotary vanes) to achieve a simpler structure and faster speeds, and have compact, lightweight and low-vibration designs. Since they greatly reduce vibrations, the VS Series can be installed with less preliminary work and expense (such as during plant foundation construction). The reinforced oil circulation and cooling water systems enable stable evacuation performance at high intake pressures, enabling use in processes with repetitive evacuation, and a wide range of other applications.

VS Series

Applications
Evaporation, sputtering, ion plating
Vacuum packaging, vacuum adhesion/conveying, vacuum forming, vacuum casting
Vacuum heat treatment furnaces, sintering furnaces, brazing furnaces
Vacuum drying, freeze-drying, vacuum deairing
Gas substitution/supply, vacuum insulation
Leak test equipment, other

Specifications