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By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 KPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-C Series is ideal for general-purpose applications and clean applications. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces.
Features
Oil filter
No lubrication oil in casing chamber, enabling stable performance for water vapor or solvent vapor.
Corrosion resistance
Major components are Tufram-processed, for high surface hardness and outstanding corrosion resistance. Tufram-processed components reduce damage and corrosion inside pump. (Tufram process is used on PRC-A Series and PMB-C(M) Series.)
PMB-CM/PRC-A (effective at achieving faster evacuation) can be started at same time as rough pump driven by atmospheric pressure, enabling faster evacuation than standard type.
Evacuation direction can be selected (PMB-024C(M), 040B, 060B).
Vertical or horizontal evacuation direction can be selected, for more compact systems with greater design freedom.
Specifications
| Model/Item | PMB-001C,CM | PMB-003C,CM | PRC-003A | PRC-006A | | Effective evacuation speed (m3/h(L/min)) (*1) | 50Hz | 95(1580) | 280(4670) | 280(4670) | 500(8330) | | 60Hz | 115(1920) | 330(5500) | 330(5500) | 600(10000) | | Maximum intake pressure | 50Hz | 9.3 * 103 | 1.2 *103 | 1.3 *103 | | (Pa; PMB-C only)(*2) | 60Hz | 7.3 * 103 | 9.3*103 | 1.1 *103 | | Maximum permitted pressure difference (Pa; PMB-C only)(*2) | 50Hz | 8.0*103 | 4.0 *103 | 7.3 * 103 | | 60Hz | 6.7*103 | 3.3* 103 | 6.0 *103 | | Final pressure (Pa) (*3) | 4.0 * 10 -1 | | Supported drive pressure(Pa) (*4) | to 1.0 *105 (PRC-A,PMB-CM) | Motor power (kW)
(number of poles) (*5) | 0.4(2) | 0.75(2) | 2.2(2) | | Oil (*6) | ULVOIL R-4 | | Required oil amount (L) (*7) | 0.35 | 0.7 | 1.5 | | Cooling water | Cooling method | Air-cooled | Air-cooled, water-cooled | Water-cooled | | Primary pressure (MPa) | - | 0.3 | | Outlet/inlet differential pressure (MPa) | - | 0.05 | 0.01 | | Flow rate (l/min) | - | 2 | | Temperature (?) | - | 5 to 30 | | Intake size (JIS B 2290) | VG50 size | VG80 size | VG100 size | | Vent size (JIS B 2290) | VF50 size | VF80 size | | External dimensions (L x WxH;mm) | 217*529 * 180 | 290 * 656 *260 | 296* 565 *260 | 356 * 619*320 | | Weight (kg) (*8) | 22(23) | 46(48) | 51(54) | 86(90) | | Standard auxiliary pump | EC403 | EC603 | EC803 | | Options | - | 1.5 kW motors (2) | Atmospheric pressure drive type | | Lubrication chamber evacuation support | Effective evacuation speed
(m3/h (l/min)) (*1) | 50Hz | 1000 | 2000 | 3800 | 6200 | | 16700 | 33300 | 63300 | 103300 | | 60Hz | 1200 | 2400 | | | | 20000 | 40000 | | | Maximum intake pressure
(Pa; PMB-C only) (*2) | 50Hz | 1.3 *10 3 | 8.0 * 102 | 1.3 * 103(5 minutes or less at startup)8.0 * 102 | | 60Hz | 1.1*103 | 6.7 *102 | (during continuous operation ) | | Maximum permitted pressure difference (Pa; PMB-C only) (*2) | 50Hz | 7.3 *103 | 5.6 *103 | - | - | | 60Hz | 6.0 *103 | 4.7* 103 | | Final pressure (Pa) (*3) | 6.7 *10 -1 | | Supported drive pressure (Pa) (*4) | to 1.0 x 105 (PRC-A,PMB-CM) | | Motor power (kW) (number of poles) (*5) | 3.7(2) | 7.5(2) | 15(4) | 18.5(4) | | Oil (*6) | ULVOIL R-4 | | Required oil amount (L) (*7) | 1.9 | 4.5(2.8) | 6.5 | | Cooling water | Cooling method | Water-cooled | | Primary pressure (MPa) | 0.3 | 0.1 to 0.2 | | Outlet/inlet differential pressure (MPa) | 0.01 | 0.05 | | Flow rate (l/min) | 3 | 24 | | Temperature (?) | 5 to 30 | | Intake size (JIS B 2290) | VG100 size | VG200 size | VG250 size | VG300 size | | Vent size (JIS B 2290) | VF80 size | VF200 size | VF150 size | VF200 size | | External dimensions (L * W *H; mm) | 406 *759 *340 | 540 *1237 *470 | 764*1230*707 | 764 *1470 * 707 | | Weight (kg) (*8) (*9) | 118(123) | 260(272) | 950
(without motor) | 1150
(without motor) | | Standard auxiliary pump | VS1501 | PKS-070 | PKS-070 *2 | | Options | Atmospheric pressure drive type | 11 kW motors (2) | Bypass valve, piping |
Note: This catalog uses SI measurement units. Conversion to non-SI units is as follows:
Final pressure: 4.0 x 10-1 Pa = 3.0 x 10-3 torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2
*1 Measured value at 13 Pa
*2 With optional large-capacity motor, the intake pressure and pressure difference can be increased.
*3 Measured by Pirani vacuum gauge (standard auxiliary pump and oil).
4.0 x 10-2 Pa with MacLeod vacuum gauge
*4 For PMB-024CM, set the repeated evacuation time for air/vacuum (>655 Pa) to no more than 5 minutes, and the interval to the next evacuation process to at least 5 minutes.
*5 200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*6 Pump oil types other than the standard type are available. Contact ULVAC.
*7 Oil volume values in parentheses ( ): For models performing evacuation in horizontal direction
*8 W = width, D = depth, H = height
*9 Weight values in parentheses ( ): Values for CM models
PRC Series models are not available as explosion-proof types or increased safety types.
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Vacuum Pump 
