Sinovac Technology Limited - PMB-B/C Series Mechanical Booster Pumps

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PMB-B/C Series Mechanical Booster Pumps

By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 KPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-C Series is ideal for general-purpose applications and clean applications. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces.

Features
Oil filter
No lubrication oil in casing chamber, enabling stable performance for water vapor or solvent vapor.
Corrosion resistance
Major components are Tufram-processed, for high surface hardness and outstanding corrosion resistance. Tufram-processed components reduce damage and corrosion inside pump. (Tufram process is used on PRC-A Series and PMB-C(M) Series.)
PMB-CM/PRC-A (effective at achieving faster evacuation) can be started at same time as rough pump driven by atmospheric pressure, enabling faster evacuation than standard type.
Evacuation direction can be selected (PMB-024C(M), 040B, 060B).
Vertical or horizontal evacuation direction can be selected, for more compact systems with greater design freedom.

Specifications

Model/Item			PMB-001C,CM	PMB-003C,CM	PRC-003A	PRC-006A
Effective evacuation speed (m³/h(L/min)) (*1)		50Hz	95(1580)	280(4670)	280(4670)	500(8330)
		60Hz	115(1920)	330(5500)	330(5500)	600(10000)
Maximum intake pressure		50Hz	9.3 * 10³	1.2 *10³		1.3 *10³
(Pa; PMB-C only)(*2)		60Hz	7.3 * 10³	9.3*10³		1.1 *10³
Maximum permitted pressure difference (Pa; PMB-C only)(*2)		50Hz	8.0*10³	4.0 *10³		7.3 * 10³
		60Hz	6.7*10³	3.3* 10³		6.0 *10³
Final pressure (Pa) (*3)			4.0 * 10^-1
Supported drive pressure(Pa) (*4)			to 1.0 *10⁵ (PRC-A,PMB-CM)
Motor power (kW) (number of poles) (*5)			0.4(2)	0.75(2)		2.2(2)
Oil (*6)			ULVOIL R-4
Required oil amount (L) (*7)			0.35	0.7		1.5
Cooling water	Cooling method		Air-cooled	Air-cooled, water-cooled	Water-cooled
	Primary pressure (MPa)		-	0.3
	Outlet/inlet differential pressure (MPa)		-	0.05	0.01
	Flow rate (l/min)		-	2
	Temperature (?)		-	5 to 30
Intake size (JIS B 2290)			VG50 size	VG80 size		VG100 size
Vent size (JIS B 2290)			VF50 size	VF80 size
External dimensions (L x WxH;mm)			217529 180	290 * 656 *260	296* 565 *260	356 * 619*320
Weight (kg) (*8)			22(23)	46(48)	51(54)	86(90)
Standard auxiliary pump			EC403	EC603		EC803
Options			-	1.5 kW motors (2)	Atmospheric pressure drive type
			Lubrication chamber evacuation support
Effective evacuation speed (m3/h (l/min)) (*1)		50Hz	1000	2000	3800	6200
			16700	33300	63300	103300
		60Hz	1200	2400
			20000	40000
Maximum intake pressure (Pa; PMB-C only) (*2)		50Hz	1.3 *10³	8.0 * 10²	1.3 * 10³(5 minutes or less at startup)8.0 * 10²
		60Hz	1.1*10³	6.7 *10²	(during continuous operation )
Maximum permitted pressure difference (Pa; PMB-C only) (*2)		50Hz	7.3 *10³	5.6 *10³	-	-
		60Hz	6.0 *10³	4.7* 10³
Final pressure (Pa) (*3)			6.7 *10^-1
Supported drive pressure (Pa) (*4)			to 1.0 x 10⁵ (PRC-A,PMB-CM)
Motor power (kW) (number of poles) (*5)			3.7(2)	7.5(2)	15(4)	18.5(4)
Oil (*6)			ULVOIL R-4
Required oil amount (L) (*7)			1.9	4.5(2.8)	6.5
Cooling water	Cooling method		Water-cooled
	Primary pressure (MPa)		0.3			0.1 to 0.2
	Outlet/inlet differential pressure (MPa)		0.01	0.05
	Flow rate (l/min)		3		24
	Temperature (?)		5 to 30
Intake size (JIS B 2290)			VG100 size	VG200 size	VG250 size	VG300 size
Vent size (JIS B 2290)			VF80 size	VF200 size	VF150 size	VF200 size
External dimensions (L * W *H; mm)			406 759 340	540 1237 470	7641230707	764 1470 707
Weight (kg) (8) (9)			118(123)	260(272)	950 (without motor)	1150 (without motor)
Standard auxiliary pump			VS1501	PKS-070		PKS-070 *2
Options			Atmospheric pressure drive type	11 kW motors (2)	Bypass valve, piping

Note: This catalog uses SI measurement units. Conversion to non-SI units is as follows:
Final pressure: 4.0 x 10-1 Pa = 3.0 x 10-3 torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2
*1 Measured value at 13 Pa
*2 With optional large-capacity motor, the intake pressure and pressure difference can be increased.
*3 Measured by Pirani vacuum gauge (standard auxiliary pump and oil).
4.0 x 10-2 Pa with MacLeod vacuum gauge
*4 For PMB-024CM, set the repeated evacuation time for air/vacuum (>655 Pa) to no more than 5 minutes, and the interval to the next evacuation process to at least 5 minutes.
*5 200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*6 Pump oil types other than the standard type are available. Contact ULVAC.
*7 Oil volume values in parentheses ( ): For models performing evacuation in horizontal direction
*8 W = width, D = depth, H = height
*9 Weight values in parentheses ( ): Values for CM models
PRC Series models are not available as explosion-proof types or increased safety types.

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