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KS Series High-vacuum Oil Diffusion Pumps |
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KS series high vacuum oil
diffusion pumps are main equipments which are used in obtaining high vacuum and
ultra vacuum states of 10-2~10-5Pa. High vacuum pumping system is composed of
they and vacuum components such as valve, cold trap, pipe, and mechanical
vacuum pump etc. They can obtain ultrahigh vacuum of adopt cooling equipment of
liquid nitrogen and so on and add measures such as roasting etc.
Features
Can be upgrade
Currency type
Applications
Vacuum coating
Vacuum heat treatment
Main Specifications
|
Model/ Parameter
|
KS-80
|
KS-100
|
KS-150
|
KS-200
|
KS-300
|
KS-320
|
KS-400
| |
Ultimate Pa (Torr)
|
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 |
≤5×10-5
≤3.8×10-3 | |
Pumping speed (L/s)
|
≥180
|
≥300
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≥800
|
≥1500
|
≥3000
|
≥3500
|
≥6000
| |
Critical backing pressure
(Pa/Torr)
|
≥30/
≥0.23
|
≥30/
≥0.23
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≥30/
≥0.23
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≥40/
≥0.3
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≥40/
≥0.3
|
≥40/
≥0.3
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≥40/
≥0.3
| |
Heating power (kW)
|
0.45
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0.55
|
0.95
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1.5
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2.4
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3
|
3
| |
Voltage of power supply (V)
|
220
|
220
|
220
|
220
|
220
|
220
|
380
| |
Cooling water consumption (L/h)
|
40
|
100
|
140
|
260
|
450
|
480
|
600
| |
Pump oil type
|
KS-3 or silicon oil-275
| |
Pump oil consumption (L)
|
0.1
|
0.15
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0.4
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0.5
|
1.3
|
1.8
|
3.5
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Backing pump pumping speed (L/s)
|
2
|
4
|
8
|
8
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15
|
15
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30
| |
Pump side (L×W×H) mm
|
213*108
*320
|
253*218
*327
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345*240
*492
|
440*310
*510
|
593*415
*780
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578*424
*660
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830*530
*986
| |
Weight (kg)
|
7
|
11
|
23
|
29
|
73
|
85
|
140
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Model/Parameter
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KS-500
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KS-600
|
KS-630
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KS-800
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KS-1000
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KS-1200
| |
Ultimate Pa
(Torr)
|
≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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Pumping speed (L/s)
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≥8000
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≥12500
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≥16000
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≥21000
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≥35000
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≥45000
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Critical backing pressure (Pa)
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≥40
| |
Heating power (kW)
|
9-15
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8.4
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8.4
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8.4
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22
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24
| |
Voltage of power supply (V)
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380
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380
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380
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380
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380
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380
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Cooling water consumption (L/h)
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530
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770
|
810
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1230
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1546
|
1900
| |
Pump oil type
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KS-3 or silicon oil-275
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Pump oil consumption (L)
|
4-6
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7
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8
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10
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15
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20
| |
Backing pump pumping speed (L/s)
|
70
|
70
|
140
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150
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300
|
300
| |
Pump side (L×W×H) mm
|
980*660
*1220
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1175*780
*1365
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1115*792
*1135
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1520*92
0*1480
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1200*1490
*1900
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2200*1400
*2465
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Weight (kg)
|
200
|
340
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380
|
550
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1060
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1430
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Connection dimensions of KS series high �
vacuum oil diffusion pumps
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Type/Size
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KS-80
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KS-100
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KS-150
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KS-200
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KS-300
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KS-320
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DNs
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80
|
100
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150
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200
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300
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320
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D1
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145
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170
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220
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275
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380
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370
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D2
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125
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145
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195
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250
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350
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| |
A
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105
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130
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180
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240
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330
|
290
| |
L
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100
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125
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165
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200
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280
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280
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n1-?1
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4-?9
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4-?12
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8-?12
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8-?12
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8-?14
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dg
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25
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32
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50
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65
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80
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80
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d1
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70
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78
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110
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125
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145
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110
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d2
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55
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64
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90
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105
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125
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n2-?2
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4-?7
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4-?9
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4-?9
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4-?9
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4-?9
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| |
H
|
267
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310
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474
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486
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755
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645
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Type/Size
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KS-400
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KS-500
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KS-600
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KS-630
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KS-800
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KS-1000
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KS-1200
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DN
|
400
|
500
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600
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630
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800
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1000
|
1200
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D1
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500
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550
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710
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720
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920
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1140
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1360
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D2
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465
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670
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880
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1090
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1310
| |
A
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440
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630
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660
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550
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880
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780
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1300
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L
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360
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550
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600
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450
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800
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850
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1200
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n1-?1
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8-?18
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12-?21
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20-?21
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24-?23
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28-?25
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dg
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100
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125
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150
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160
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200
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200
|
300
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d1
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170
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155
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220
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200
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275
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275
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380
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d2
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145
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195
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250
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250
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350
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n2-?2
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4-?12
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8-?12
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8-?12
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8-?12
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8-?14
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H
|
960
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1200
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1340
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1115
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1450
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1800
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2440
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Vacuum Pump 
