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KSA Series High-vacuum Oil Diffusion Pumps |
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KSA series high vacuum oil diffusion pumps are main
equipments which are used in obtaining high vacuum and ultra vacuum states of 10-1~10-5
Pa, the system has much eximious characteristic, includes low height, small volume,
high pumping speed. New KSA series pumps adopt interiorly-heating technology.
However, the system can offer high pumping speed under 1.3×10-1 Pa and high
critical backing pressure
Features
Low height, small volume, interiorly heating
High pumping speed (offer high pumping speed under 1.3×10-1 Pa)
High critical backing pressure
Applications
Vacuum heat treatment
Vacuum coating
Main Specifications
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Model/Parameter
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KS
-200A
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KS
-400A
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KS
-600A
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KS
-630A
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KS
-800A
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KS
-1000A
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Ultimate Pa
(Torr)
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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≤5*10-5
≤3.8*10-3
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Pumping speed (L/s)
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≥150
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≥6300~7200
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≥14000
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≥16500
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≥26000
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≥45000
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Critical backing pressure (Pa/Torr)
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≥40
/≥0.3
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≥40
/≥0.3
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≥40
/≥0.3
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≥50
/≥0.38
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≥50
/≥0.38
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≥50
/≥0.38
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Heating power (kW)
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1.8
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5.4~6
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8.4
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12
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18
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24
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Voltage of power supply (V)
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220
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380
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380
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380
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380
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380
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Cooling water consumption (L/h)
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300
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600
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800
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930
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1000
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1500
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Pump oil type
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KS – 3 or silicon oil
-- 275
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Pump oil consumption (L)
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0.55
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3
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7
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5~9
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8~10
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12~25
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Backing pump pumping speed (L/s)
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15
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70
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140
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140
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140
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300
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Pump side (L×W×H) mm
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420*330
*490
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700*505
*725
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950*760
*1070
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1006*840
*1160
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1205*960
*1460
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1473*1130
*1890
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Weight (kg)
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25
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120
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300
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320
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450
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620
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Connection dimensions of KSA series high-vacuum & low back-streaming
rate oil diffusion pumps
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Type/Size
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KS
-200A
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KS
-400A
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KS
-600A
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KS
-630A
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KS
-800A
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KS
-1000A
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DN
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200
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40
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600
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630
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800
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1000
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D1
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275
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500
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710
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750
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920
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1120
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D2
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250
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465
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670
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720
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890
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1090
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A
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220
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324
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480
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540
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600
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800
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L
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200
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285
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440
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630
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800
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1275
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n1-Ф1
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8-Ф12
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8-Ф18
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12-Ф21
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20-Ф14
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24-Ф14
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32-Ф14
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dg
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65
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80
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150
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100
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160
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160
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d1
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125
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145
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220
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165
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225
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225
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d2
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105
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125
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195
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145
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200
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200
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n2-Ф2
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4-Ф9
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4-Ф9
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8-Ф12
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8-Ф12
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8-Ф10
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8-Ф10
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H
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470
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694
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1064
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1145
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1450
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1880
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Vacuum Pump 
