Sinovac Technology Limited - KSA Series High-vacuum Oil Diffusion Pumps

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KSA Series High-vacuum Oil Diffusion Pumps

KSA series high vacuum oil diffusion pumps are main equipments which are used in obtaining high vacuum and ultra vacuum states of 10-1~10-5 Pa, the system has much eximious characteristic, includes low height, small volume, high pumping speed. New KSA series pumps adopt interiorly-heating technology. However, the system can offer high pumping speed under 1.3×10-1 Pa and high critical backing pressure

Features
Low height, small volume, interiorly heating
High pumping speed (offer high pumping speed under 1.3×10-1 Pa)
High critical backing pressure
Applications
Vacuum heat treatment
Vacuum coating

Main Specifications

Model/Parameter	KS -200A	KS -400A	KS -600A	KS -630A	KS -800A	KS -1000A
Ultimate Pa (Torr)	≤510^-5 ≤3.810^-3	≤510^-5 ≤3.810^-3	≤510^-5 ≤3.810^-3	≤510^-5 ≤3.810^-3	≤510^-5 ≤3.810^-3	≤510^-5 ≤3.810^-3
Pumping speed (L/s)	≥150	≥6300~7200	≥14000	≥16500	≥26000	≥45000
Critical backing pressure (Pa/Torr)	≥40 /≥0.3	≥40 /≥0.3	≥40 /≥0.3	≥50 /≥0.38	≥50 /≥0.38	≥50 /≥0.38
Heating power (kW)	1.8	5.4~6	8.4	12	18	24
Voltage of power supply (V)	220	380	380	380	380	380
Cooling water consumption (L/h)	300	600	800	930	1000	1500
Pump oil type	KS – 3 or silicon oil -- 275
Pump oil consumption (L)	0.55	3	7	5~9	8~10	12~25
Backing pump pumping speed (L/s)	15	70	140	140	140	300
Pump side (L×W×H) mm	420330 490	700505 725	950760 1070	1006840 1160	1205960 1460	14731130 1890
Weight (kg)	25	120	300	320	450	620

Connection dimensions of KSA series high-vacuum & low back-streaming rate oil diffusion pumps

Type/Size	KS -200A	KS -400A	KS -600A	KS -630A	KS -800A	KS -1000A
DN	200	40	600	630	800	1000
D1	275	500	710	750	920	1120
D2	250	465	670	720	890	1090
A	220	324	480	540	600	800
L	200	285	440	630	800	1275
n1-Ф1	8-Ф12	8-Ф18	12-Ф21	20-Ф14	24-Ф14	32-Ф14
dg	65	80	150	100	160	160
d1	125	145	220	165	225	225
d2	105	125	195	145	200	200
n2-Ф2	4-Ф9	4-Ф9	8-Ф12	8-Ф12	8-Ф10	8-Ф10
H	470	694	1064	1145	1450	1880

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