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KSTD Series Oil Diffusion Pump |
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Its
structure is convex. They can obtain high-vacuum and ultrahigh vacuum states of
10-2~10-5Pa. Because water-cooling baffling oil cap and pump body is
integrated, they effective pumping speed of system and save expenses of
configuration. There are many characteristics of high pumping speed, low back-streaming
rate, and simple structure. They are widely had application in areas of
electron, metallurgy, vacuum coating, space simulation etc
Features
Structure is convex, simple structure
Low cost of configuration, low back-streaming rate
High pumping speed
Applications
Metallurgy, electron, vacuum coating, space simulatio
Main Specifications
|
Model/Parameter
|
KS-100TD
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KS-320TD
|
KS-500TD
| |
Ultimate
Pa
(Torr)
|
≤5×10-5
≤3.8×10-5 |
≤5×10-5
≤3.8×10-5 |
≤5×10-5
≤3.8×10-5 | |
Pumping
speed (L/s)
|
Single
pump
|
≥300
|
≥4200
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≥10000
| |
Baffle
|
≥240
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≥3500
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≥8000
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Critical
backing pressure (Pa/Torr)
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≥30/≥0.23
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≥40/≥0.3
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≥40/≥0.3
| |
Back-streaming
rate (mg/cm2*min)
|
Single
pump
|
≤5×10-3
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Baffle
|
≤6×10-4
| |
Heating
power (kW)
|
0.3
|
4
|
6.9
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Voltage
of power supply (V)
|
220
|
220
|
380
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Cooling
water consumption (L/h)
|
120
|
500
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750
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Pump oil type
|
KS-3 or silicon oil--275
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Pump
oil consumption (L)
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0.12
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1.5~1.8
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4.4~5
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Backing
pump pumping speed (L/s)
|
15
|
30
|
70
| |
Pump
side (L*W*H) mm
|
305*170*385
|
730*500*910
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1065*680*1285
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Weight
(kg)
|
10
|
70
|
125
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Model/Parameter
|
KS-800TD
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KS-1000TD
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KS-1200TD
| |
Ultimate
Pa
(Torr)
|
≤5×10-5
≤3.8×10-5 |
≤5×10-5
≤3.8×10-5 |
≤5×10-5
≤3.8×10-5 | |
Pumping
speed (L/s)
|
Single
pump
|
≥24000
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≥38000
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≥55000
| |
Baffle
|
≥20000
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≥32000
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≥50000
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Critical
backing pressure (Pa/Torr)
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≥40/≥0.3
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≥40/≥0.3
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≥40/≥0.3
| |
Back-streaming
rate (mg/cm2�min)
|
Single
pump
|
≤5×10-3
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Baffle
|
≤6×10-4
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Heating
power (kW)
|
15
|
24
|
24
| |
Voltage
of power supply (V)
|
380
|
380
|
380
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Cooling
water consumption (L/h)
|
1200
|
1500
|
2400
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Pump oil type
|
KS-3 or silicon oil--275
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Pump
oil consumption (L)
|
10
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16
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16~20
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Backing
pump pumping speed (L/s)
|
300
|
300
|
500
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Pump
side (L*W*H) mm
|
1700*1000*1955
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2020*1290*2325
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2300*1550*2670
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Weight
(kg)
|
850
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980
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1640
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Connection dimensions of KTD series high-vacuum & low back-streaming
rate oil diffusion pumps
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Type/Size
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KS-100TD
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KS-320TD
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KS-500TD
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KS-800TD
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KS-1000TD
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KS-1200TD
| |
DN
|
112
|
320
|
500
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800
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1000
|
1200
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D1
|
160
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425
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610
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920
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1140
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1360
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D2
|
145
|
395
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580
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880
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1090
|
1310
| |
A
|
145
|
400
|
610
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920
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1150
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1300
| |
L
|
150
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240
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500
|
800
|
1060
|
1200
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n1-?1
|
8-M8
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12-?14
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16-?14
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20-?21
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24-?23
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28-?26
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dg
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24
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100
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160
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300
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350
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300
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d1
|
40
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165
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225
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380
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435
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380
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d2
|
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145
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200
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350
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405
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350
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n2-?2
|
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8-?9
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8-?12
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8-?14
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8-?14
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8-?14
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H
|
365
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890
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1265
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1935
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2305
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2650
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Vacuum Pump 
