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ZKS Series High-vacuum Oil Diffusion Pumps |
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Oil
diffusion booster pumps are main obtaining equipments which are used in
obtaining high vacuum of 1.3*10-1~10-5Pa. Pumping system is composed of they
and vacuum components such as valve, water-cooling baffle, pipe, and
mechanical vacuum pump etc. Because diffusion booster pumps have still higher
pumping speed at 1.3*10-1Pa and adopt characteristics of inner-heating manner
and which quickly starting. They specially have application in many trades of
vacuum film-coating and vacuum metallurgy and so on.
Features
Have
still higher pumping speed at 1.3*10-1Pa
Applications
Vacuum film coating
Vacuum metallurgy
Main Specifications
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Model/Parameter
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ZKS-400
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ZKS-600T
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Ultimate
(Pa/Torr)
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≤6.7×10-5
/≤5×10-3 |
≤6.7×10-5
/≤5×10-3 | |
Pumping
speed (L/s)
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≥5500(1.3×10-3~6.7×10-2Pa/1×10-5
~5×10-4 Torr)
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≥16500(1.3×10-3~6.7×10-2Pa/1×10-5
~5×10-4 Torr)
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≥2500
(1.3×10-1Pa/1×10-3 Torr)
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≥8000
(1.3×10-1Pa/1×10-3 Torr)
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Critical
backing pressure (Pa/Torr)
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≥50/≥0.38
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≥40/≥0.3
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Heating
power (kW)
|
5.1
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15
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Voltage
of power supply (V)
|
220
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380
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Cooling
water consumption (L/h)
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400
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900
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Pump
oil type
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KS-3
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Pump
oil consumption (L)
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2
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16
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Backing
pump pumping speed (L/s)
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70
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150
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Pump
side (L*W*H) mm
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550*570*825
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1200*780*1500
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Weight
(kg)
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150
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390
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Connection dimensions of ZK series high-vacuum oil diffusion booster pumps
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Type/Size
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ZK-400
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ZK-600
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DN
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400
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600
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D1
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510
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710
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D2
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480
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670
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A
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471
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660
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L
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314
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700
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n1-Ф1
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16-Ф14
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12-Ф21
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dg
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80
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150
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d1
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145
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220
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d2
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125
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195
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n2-Ф2
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8-Ф10
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8-Ф12
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H
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807
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1480
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Vacuum Pump 
