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SF250/1500 Turbo Molecular Pump |
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Product descriptions
SF250/1500 TMP consists of a series of fast moving rotor blades and stationary stator blades lined up across each other. Gas molecules, which collide with fast moving rotor blades, are given the momentum to move along the surface. Through the combination of a series of rotor blades and stator blades, the gas molecules are impacted to move continuously towards a certain direction, and as a result generate an effect of air extraction and evacuation
SF250/1500 TMP can be simply operated and vertically or horizontally assembled. It is featured with fast start-up, low vibration, low noise and low power consumption. As there exits no oil contamination in the clean vacuum area, the pump can produce a clean and hydrocarbon-free vacuum.
Application
The pumps can be used for corrosive atmosphere working environment such as ion instance, plasma and semiconductor device production.
Specification
| Model | SFF250/1500T | | Inlet Port Flange Diameter | DN160LF | DN160CF | | Pumping Speed L/s(to air) | 600 | | Maximum Compression Ratio | N2 | >108 | | H2 | 5*102 | | Ultimate Pressure | 6*10-6(Pa) | 6*10-7 (Pa) | | 6*10-8(mbar) | 6*10-9(mbar) | | 4.5*10-8(Torr) | 4.5*10-9(Torr) | | Exhaust Port Flange Diameter | KF50 | | Bearing | | | Start up time(min) | <8 | | Rotation Speed(rpm) | 21,000 | | Cooling Method | Water Cooled | | Installation Method | Perpendicularity±5° | | Weight(kg) | 60 | | Power type | FD1500K | | Input voltage(V) | 220±20 | | Input frequency(Hz) | 50/60±3 | | Maximum output power consumption (W) | 1000 | | Output frequency(Hz) | 350±10 | | Working voltage(V) | ?50 | | Working current(A) | ?50 | | Maximum current(A) | ?16 | | Allowable surrounding temperature(?) | 5-40 | | Allowable surrounding humidity | ?80% | | Weight(kg) | 13 | | Length*Weight*Height | 300*440*173 |
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Vacuum Pump 
