Sinovac Technology Limited

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The setting up of the Sinovac Technology Limited is dedicated to recommend the Chinese excellent vacuum product to the world. The mainly vacuum products that we supply as follow:  Vacuum Pump & Pumping System                 Vacuum Components
 Vacuum Valve                 Arc Ion Evaporation Equipment      Contact Number: +86-760-88282173

 
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The STN-500A has been specially designed for small volume products tools & decorative coating. For small volume products the STN-500A offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.The STN-500AT has been specially designed for tools coating of small volume products.For small volume products the STN-500AT offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times. Inner size of the chamber - Diameter: 400~600mm; Height: 400mm~600mm
Vacuum pumping system - Oil diffusion pump + Root's pump + Rotary pump
Controlling system - PLC & Touch Screen OR PLC & PC
Ionization source & Bias power supply - Number. of targets:1~2
Power of BIAS: 5kW~10kW

Specification
ModelSTN-500ASTN-500AT
Process ChamberΦ500mm*H500mmΦ550*H600mm
Pumping System 
Backing PumpRotary vane pump with 108m3/h
Diffusion PumpOil diffusion pump with 7200m3/h *A
System ControlPLC control
Cathodes2 unit3 unit (optional)
Cathodes PowerMax 160A
Bias Power Supply15KW,0-600V
Process Gas System 
500sccm3 unit2 unit
1000sccm-1 unit
Heating System0-6KW , PID contol
Power380V three phase four line
Turntable 
Driving System3unit,rotation,revolution
Driving Control0-18rpm (variable)
Cooling Water SystemPL-05 (optional)
Oven8KW,800*800*1000mm (optional)
*A: STN-500A can also equipped with molecular pump with pumping speed 600 L /s; and for STN-500AT with turbo molecular pump with pumping speed 1500 L /s
 
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