Sinovac Technology Limited

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The setting up of the Sinovac Technology Limited is dedicated to recommend the Chinese excellent vacuum product to the world. The mainly vacuum products that we supply as follow:  Vacuum Pump & Pumping System                 Vacuum Components
 Vacuum Valve                 Arc Ion Evaporation Equipment      Contact Number: +86-760-88282173

 
Home arrow PVD Coating System arrow Small scale PVD System
Small-scale PVD Coating System PDF Print E-mail

The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.
The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.
Inner size of the chamber --- Diameter: 600~800mm;
Height: 600mm~1000mm;
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump;
Controlling system --- PLC & Touch Screen or PLC & PC;
Ionization source & Bias power supply --- Number of targets: 4~8;
Power of BIAS: 10kW~20kW
Specification
ModelSTN-4B6
Process Chamberφ800mm*H800mm
Pumping System 
Backing PumpRotary vane pump with 108m3/h
Roots PumpRoots pump with 1080m3/h
Diffusion PumpOil diffusion pump with 28080m3/h
Hold PumpRotary vane pump with 54L/s
System ControlPLC touch screen
Cathodes6 unit
Cathodes PowerMax 160A
Bias Power Supply30KW,0-1000V
Process Gas System 
500sccm2 unit
1000sccm2 unit
Heating System0-12KW , PID contol
Power380V three phase four line
Turntable 
Driving System6*4unit,rotation,revolution
Driving Control0-18rpm (variable)
Cooling Water SystemPL-08 (optional)
Oven8KW,800*800*1000mm (optional)

 
 
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