Sinovac Technology Limited

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The setting up of the Sinovac Technology Limited is dedicated to recommend the Chinese excellent vacuum product to the world. The mainly vacuum products that we supply as follow:  Vacuum Pump & Pumping System                 Vacuum Components
 Vacuum Valve                 Arc Ion Evaporation Equipment      Contact Number: +86-760-88282173

 
Middle-scale PVD Coating System PDF Print E-mail

 

The STN-10 Series coating system was specially designed for large products decorative coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 12 or 14 cathode Arc Ion Sources. The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.For the required golden color the system is provided with Titanium targets and Zirconium targets, also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process.The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability. Inner size of the chamber - Diameter:1000~1250mm; Height: 1250mm~1500mm
Vacuum pumping system - Oil diffusion pump + Root's pump + Rotary pump
Controlling system - PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply - Number of targets:10~14;
Power of BIAS - 15kW~30kW

Specification
ModelSTN-10DSTN-10FD30
Process ChamberΦ1000mm*H1500mmΦ1250*H1500mm
Pumping System 
Backing PumpRotary vane pump with 252m3/h
Roots PumpRoots pump with 1080m3/h
Diffusion PumpOil diffusion pump with 45000m3/h
Hold PumpRotary vane pump with 108m3/h
System ControlPLC touch screen control
Cathodes10 unit14 unit (optional)
Cathodes PowerMax 160A
Bias Power Supply30KW,0-1000V
Process Gas System 
500sccm2 unit
1000sccm2 unit
Heating System0-18KW , PID contol
Power380V three phase four line
Turntable 
Driving System6*4unit,rotation,revolution
Driving Control0-18rpm (variable)
Cooling Water SystemPL-05 (optional)PL-08 (optional)
Oven8KW,800*800*1000mm (optional)

 

Equipment
PVD Coating System
   coating system
 
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