Description
Ionization source & Bias power supply
No. of targets:16~26;
Power of BIAS: 30kW~45kW.
The proposed coating system is the PVD COATING SYSTEM TYPE STN-20D30. The STN-20D30 has an enlarged loadingcapacity and has been specially designed for large volume products decorative coating. For large volume products the STN-20D30 offers an unsurpassed productivity. This equipment is especially developed for those applications requiring extreme large coating space, high loading capacity, low temperatures (<300 ℃) and short cycle times. This makes this system especially well suited for decorative parts.The vacuum chamber unit has a cylinder design with one door opened on the top of the process chamber and 26 (twenty-six) cathode Arc Ion Sources.Inner size of the chamber --- Diameter: 1500~1800mm?Height: 2000mm~3500mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC