STN-4B6 TYPE PVD COATING EQUIPMENT

★ The STN-4B6 type PVD Coating Equipment has been specially designed for PVD hard-coating, for this purpose the unit is equipped with 8 arc ion sources .

★ The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.

★ For the required hard-coating the system is provided with Titanium targets and Titanium-Nitride (TiN) process.

★ Other coatings can be realized by choice of the right target material and appropriate process control.

★ The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.

★ The process is running fully automatically by a Programmable Logic Control-unit.

★ Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability.

GENERAL SPECIFICATIONS OF STN-4B6

★ Process chamber

Vacuum Chamber Inner Size Φ800*H 800 mm

Stainless steel, double walled, water cooled

One front door, water cooled front door with the same curve as the cylinder chamber in order to strengthen its rigidity. Two view ports on the door cooling by water

Substrate heating, Power 12 kW effective

Temperature control by thermo-couples

★ Pumping system

One Oil Diffusion Pump 7800L/s s

One Roots Vacuum Pump 150L/s

Two Rotary Vane Pump 30L/s & 15L/s

★ Cathodes Arc Ion Sources

Number Arc: 6

Type: Advanced Controlled Arc

Target size: Φ100 x 40 mm

Position: around chamber

Power supplies: 14, DC, max .160 A

★ Electronic

- Arc-ignition Effective

★ Turntable

Loading capacity coating zone: Φ600*H 600mm

Max. Weight: 200kg

Satellite axis 24 with integrated 6 rotation

 Satellite diameter:Φ 300mm/Φ 130mm

★ Control system

Process control Fully automatic by color Programmable Logic Control (PLC)

★ Operation Cycle time

Less than 35 min