Oil
diffusion booster pumps are main obtaining equipments which are used in
obtaining high vacuum of 1.3*10-1~10-5Pa. Pumping system is composed of they
and vacuum components such as valve, water-cooling baffle, pipe, and
mechanical vacuum pump etc. Because diffusion booster pumps have still higher
pumping speed at 1.3*10-1Pa and adopt characteristics of inner-heating manner
and which quickly starting. They specially have application in many trades of
vacuum film-coating and vacuum metallurgy and so on.
Features
Have
still higher pumping speed at 1.3*10-1Pa
Applications
Vacuum film coating
Vacuum metallurgy
Main Specifications
|
Model/Parameter
|
ZKS-400
|
ZKS-600T
|
|
Ultimate
(Pa/Torr)
|
≤6.7×10-5 /≤5×10-3 |
≤6.7×10-5 /≤5×10-3 |
|
Pumping
speed (L/s)
|
≥5500(1.3×10-3~6.7×10-2Pa/1×10-5
~5×10-4 Torr)
|
≥16500(1.3×10-3~6.7×10-2Pa/1×10-5
~5×10-4 Torr)
|
|
≥2500
(1.3×10-1Pa/1×10-3 Torr)
|
≥8000
(1.3×10-1Pa/1×10-3 Torr)
| |
|
Critical
backing pressure (Pa/Torr)
|
≥50/≥0.38
|
≥40/≥0.3
|
|
Heating
power (kW)
|
5.1
|
15
|
|
Voltage
of power supply (V)
|
220
|
380
|
|
Cooling
water consumption (L/h)
|
400
|
900
|
|
Pump
oil type
|
KS-3
|
|
|
Pump
oil consumption (L)
|
2
|
16
|
|
Backing
pump pumping speed (L/s)
|
70
|
150
|
|
Pump
side (L*W*H) mm
|
550*570*825
|
1200*780*1500
|
|
Weight
(kg)
|
150
|
390
|
Connection dimensions of ZK series high-vacuum oil diffusion booster pumps
|
Type/Size
|
ZK-400
|
ZK-600
|
|
DN
|
400
|
600
|
|
D1
|
510
|
710
|
|
D2
|
480
|
670
|
|
A
|
471
|
660
|
|
L
|
314
|
700
|
|
n1-Ф1
|
16-Ф14
|
12-Ф21
|
|
dg
|
80
|
150
|
|
d1
|
145
|
220
|
|
d2
|
125
|
195
|
|
n2-Ф2
|
8-Ф10
|
8-Ф12
|
|
H
|
807
|
1480
|