The STN-500A has been specially designed for small volume products tools & decorative coating. For small volume products the STN-500A offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.The STN-500AT has been specially designed for tools coating of small volume products.For small volume products the STN-500AT offers an stable productivity. This equipment is especially developed for those applications requiring processing different products of small output, short cycle times.
Inner size of the chamber - Diameter: 400~600mm; Height: 400mm~600mm
Vacuum pumping system - Oil diffusion pump + Root's pump + Rotary pump
Controlling system - PLC & Touch Screen OR PLC & PC
Ionization source & Bias power supply - Number. of targets:1~2
Power of BIAS: 5kW~10kW
| Specification | ||
| Model | STN-500A | STN-500AT |
| Process Chamber | Φ500mm*H500mm | Φ550*H600mm |
| Pumping System | ||
| Backing Pump | Rotary vane pump with 108m3/h | |
| Diffusion Pump | Oil diffusion pump with 7200m3/h *A | |
| System Control | PLC control | |
| Cathodes | 2 unit | 3 unit (optional) |
| Cathodes Power | Max 160A | |
| Bias Power Supply | 15KW,0-600V | |
| Process Gas System | ||
| 500sccm | 3 unit | 2 unit |
| 1000sccm | - | 1 unit |
| Heating System | 0-6KW , PID contol | |
| Power | 380V three phase four line | |
| Turntable | ||
| Driving System | 3unit,rotation,revolution | |
| Driving Control | 0-18rpm (variable) | |
| Cooling Water System | PL-05 (optional) | |
| Oven | 8KW,800*800*1000mm (optional) | |
| *A: STN-500A can also equipped with molecular pump with pumping speed 600 L /s; and for STN-500AT with turbo molecular pump with pumping speed 1500 L /s | ||